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Tuesday, November 05, 2013, 15:50, Anders Mjos, , , , , , , Problems/Solutions, Backing pressure TSG:CG1A and CG1B elevated
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Wednesday, November 20, 2013, 08:57, Anders Mjos, , , , , , , Problems/Solutions, Backing pressure TSG:CG1A and CG1B elevated
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Message ID: 343
Entry time: Tuesday, November 05, 2013, 15:50
Reply to this: 345
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Author: |
Anders Mjos |
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Target Oven W.O#: |
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Status: |
Problems/Solutions |
Subject: |
Backing pressure TSG:CG1A and CG1B elevated |
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Pressure around 140 mTorr. The pressure started increasing early November 2nd. Will continue to monitor.
Tuesday, November 12, 2013, 09:51 UPDATE
Backing pressure further increased to ~ 350 mTorr over the weekend. Vacuum group has been informed and will replace the pump this week. |
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