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 Tuesday, November 05, 2013, 15:50, Anders Mjos, , , , , , , Problems/Solutions, Backing pressure TSG:CG1A and CG1B elevated 
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 Wednesday, November 20, 2013, 08:57, Anders Mjos, , , , , , , Problems/Solutions, Backing pressure TSG:CG1A and CG1B elevated
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Message ID: 345
Entry time: Wednesday, November 20, 2013, 08:57
In reply to: 343
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| Author: |
Anders Mjos |
| Target/No.#: |
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| Module: |
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| Target Oven W.O#: |
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| Heat Shield W.O#: |
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| Status: |
Problems/Solutions |
| Subject: |
Backing pressure TSG:CG1A and CG1B elevated |
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| Anders Mjos wrote: |
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Pressure around 140 mTorr. The pressure started increasing early November 2nd. Will continue to monitor.
Tuesday, November 12, 2013, 09:51 UPDATE
Backing pressure further increased to ~ 350 mTorr over the weekend. Vacuum group has been informed and will replace the pump this week.
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The backing pump (TSG:RP1) was replaced yesterday by Anthony Ip. Backing pressure is down to 1 mTorr on TSG:CG1A |