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Message ID: 2446     Entry time: Thursday, May 25, 2023, 13:10
Author: David Wang 
Category: Conditioning Station 
Type: Maintenance 
Module: TM2 
Target/Number:  
Subject: TCS MP1 is replaced due to poor performace.  

TCS MP1 is replaced due to poor performance( system shows unstable and high reading on TCSCG1A and high TP1,TP2 current draw) . The pump is edward 15i scroll pump. Since vacuum group has no same spare pump, i have to use SMP roughing pump SMP:MP1 which is a  same pump to replace it.. After the replacement ,the TCS:CG1A and TP1, TP2 current draw are back to normal. The original TCSMP1 was surveyed. Swipes on intake and exhaust port are 300 counts and 1000counts. RAM contact field measurement are from 0.2 to 0.5 usv/hr. It is stored in TH. We will try to refurbish this pump first and use as for SMP:MP1. If we can not refurbish it, a new 15i pump will be purchased for SMP:MP1.

2023-05-31: Opened pump tip seal chamber and swiped chamber inside. The contamination level :1200 counts on 44-2.  The tip seal and tip seal chamber o ring need to be replaced . Checked gas ballast knob. The O-ring inside knob is in good condition. Checked exhaust port o-ring. it is in good condition. spare part PO will be issued soon.

2023-06-14:Tip seals and o-ring have been replaced on original TCS:MP1. After, it was tested at TCS for 48 hours. The pump is much quiet on operation, and the pump body temperature is mild. The final  inlet pressure this pump could get with TCS PV1 closed is about 23 mtorr.  The result is good. I installed it back to TCS vacuum station and reinstalled SMP:MP1 back to SMP vacuum station.  

 

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