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Message ID: 2421     Entry time: Wednesday, March 01, 2023, 10:01
Author: David Wang 
Category: ITE/ITW 
Type: Development 
Module:  
Target/Number:  
Subject: vacuum pit ventilation upgrade.  

vacuum pit ventilation upgrade was done last week. The jobs include: installed two industrial cooling  fans.  One is placed in pit on resin tan cover. Other one is placed on and opening to pit by shielding blocks.  They are installed for better air circulation in pit. Also,  2x two small 20W cooling fans are installed on ITH MP1 and MP1S to low the pump  operation temperature.  The result is positive. The ventilation status in pit meets the pump operation requirement (good ventilation and 40 Celsuis below) .  ITH CG2S 0.0 mtorr.  ITH CG2 0.26mtorr.

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