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 Friday, November 01, 2013, 17:20, Anders Mjos, , , , Problems, Backing pump needs new filter
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 Monday, November 04, 2013, 14:02, Anders Mjos, , , , Maintenance, Backing pump replaced
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Message ID: 94
Entry time: Monday, November 04, 2013, 14:02
In reply to: 93
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| Author: |
Anders Mjos |
| Target Material: |
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| Target Oven W.O#: |
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| Source: |
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| Status: |
Maintenance |
| Subject: |
Backing pump replaced |
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| Anders Mjos wrote: |
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The source of the poor vacuum in the backing line seems to be related to a dirty filter. We will try to find a replacement filter next week.
The problem seem to have started September 17th, when backing preassure CG1A went from 40 mTorr to 130 mTorr. CG1B remained around 30 mTorr.
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With the help of Anthony Ip from vacuum group, the problem was diagnosed to be the roughing pump itself. The pump was replaced and pumping improved. The chamber can now be evacuated and turbo ready to start in less than 10 minutes.
The filter is not stocked by vacuum group and could not be replaced.
Last week parts of the roughing line was cleaned by Rick. The PVC roughing line has been replaced with a SST bellows. The SST bellows is KF25 and should be replaced by a KF40 bellows in the long run. |