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 Friday, November 01, 2013, 17:20, Anders Mjos, , , , Problems, Backing pump needs new filter
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 Monday, November 04, 2013, 14:02, Anders Mjos, , , , Maintenance, Backing pump replaced
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Message ID: 93
Entry time: Friday, November 01, 2013, 17:20
Reply to this: 94
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| Author: |
Anders Mjos |
| Target Material: |
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| Target Oven W.O#: |
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| Source: |
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| Status: |
Problems |
| Subject: |
Backing pump needs new filter |
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The source of the poor vacuum in the backing line seems to be related to a dirty filter. We will try to find a replacement filter next week.
The problem seem to have started September 17th, when backing preassure CG1A went from 40 mTorr to 130 mTorr. CG1B remained around 30 mTorr. |