Laura Lambert wrote: |
John Wong wrote: |
Laura Lambert wrote: |
John Wong wrote: |
Wednesday, January 15, 2014, 17:30
Target container is coated with TaC. No Ta-heat shields are used.
TGHT will be ramped up to 580A at 0.2A/min.
TBHT will be ramped up to 230A at 0.2A/min.
Chamber is currently being pumped. Tomorrow, the HS water valve can be opened to test for leaks.
Notes:
If everything is fine, TGHT/TBHT can be stepped up to 30A-50A. Watch for the vacuum; once it's stable the auto ramping program can be initiated.
Once TGHT/TBHT reached above 200A, the ramping rate for TGHT can be increased up to 2A/min. (This step is to speed up the process; however it's not mandatory)
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Thursday, January 16, 2014, 11:35
Chamber was pumped down overnight to 10-7 Torr. HS water valve was opened and no leak in vacuum was observed.
TGHT and TBHT were stepped up to 35A. Waited ~30min, current stabilized and vacuum starting to drop.
Initiating auto-ramping: Good Vac = 2.0e-5 Torr, Bad Vac = 3.0e-5 Torr.
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Friday, January 17, 2014, 09:28
TGHT/TBHT @ 300/200A. TBHT voltage is limited at 3A.
TGHT ramping rate increased to 2A/min. Pressure @ 4.5e-7 Torr.
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Friday, January 17, 2014, 10:14
TBHT stopped at 200A with voltage limit sitting at 3V.
Aborted auto-ramp, changed the voltage limit to 5V and increased ramping rate to 2A/min. Re-started auto-ramp.
IGP1 @ 5.0e-7 Torr
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Friday, January 17, 2014, 12:45
TGHT voltage limiting at 9.9V, and current stayed at 560A. Increased the TGHT voltage to 10.5V and continued ramping the heater up.
TGHT/TBHT stabilized at 850A (~10V) and 230A(3.6V).
Pressure at 1.03e-6 Torr and coming down...
Target will be heated until 5pm (4hrs) before cooling down at the ramping rate of 2A/min.
Chamber will be vented in air, next week.
Friday, January 17, 2014, 16:51
Auto-cooling initiated at 2A/min.
Vac @ 5.3e-7 Torr.
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