IDP15 Scroll Pump, Std w/ inlet.
TMS:RP2
PN: X3815-64010
Serial: MY2301SA17
Thursday, April 13, 2023, 11:04: Roughing RP2
Thursday, April 13, 2023, 11:05: Open BV6 & BV2
Thursday, April 13, 2023, 11:15: TMS:TP2 & TMS:TP6 on.
Thursday, April 13, 2023, 11:19: IG6 on.
Thursday, April 13, 2023, 12:05: Vacuum @ 1.43e-05T. |