PE shimmed & extended 1mm due to likely ion source contact.
Thursday, May 12, 2022, 10:41: Roughing.
Thursday, May 12, 2022, 11:26: TP1B on.
Thursday, May 12, 2022, 11:35: TP1A on.
Thursday, May 12, 2022, 11:43: IG1 on.
Thursday, May 12, 2022, 11:48: Vacuum @ 2.65e-05T. FS#5 Opened. No immediate spike.
Thursday, May 12, 2022, 11:50: Vacuum @ 2.47e-05T & dropping.
Friday, May 13, 2022, 07:32: TP/IG off.
Friday, May 13, 2022, 09:51: Venting. |