UCx#38 developed a short between the plasma electrode and the extraction electrode about 30mins after reaching full temperature in the conditioning station. The decision was made to bring it into the anteroom and try to clean it there.
To do this, it was uninstalled, the parasitic attachments were removed and it was brought into the ante room.
I removed the EE and the PE, and cleaned quite a lot of material from them both with methanol. I think put the ionizer foil bar down the ionizer to help dislodge any material there, and I also turned the target over and tapped gently to get any material out. The first two times some flakes came out, the third time nothing came out. I then reinstalled the electrodes using the EE alignment tool (not sure how successfully, didn't push it into the ionizer too much because I was worried about catching the Rh foil).
The taret was meggered at 500V then reinstalled and electrical checks were done. Everything looks back to normal. Conditioning in ITW was successful. |