Connected LD to ITW(TM4) TP1. Base LR 0.0Xe-9 atm.cc/sec. Base pressure 0.0Xe-4 torr. All ITW primary and secondary air to vacuum seals are helium spray checked. There is a 5XE-9 atm.cc/sec leak on  exit2 module top cover plate o-ring seal. The location is on west  side, south corner of the plate. Hi- vacuum resin are sprayed to leak area, and leak checked  again. The leak is gone.   The other seals on ITW vacuum vessel are good.