I did a leak check this morning on exit 2 module at TCS. LD base leak rate is 4.00XE-9atm.cc/sec, Base pressure is 0.00 X E-4 torr. All seals, bellows, and flanges are checked. The new FC5 bellow is good. There is a big leak up to 2X E-6 atm.c/sec has been found on IG1S side panel . The panel itself will be replaced this time. Machine shop is working on it.. Two small leaks in E-9 atm.cc/sec range have been found on the o-ring between service cap steel welding frame and the whole cap top cover plate in different location . All bolts on the top plate pressing down the o-ring are very tight. I can do nothing on them. However, I sprayed some vacuum seal around the leak area. The leaks are small and close to ITE TP1S. I don not think we have to replace it at this moment. Basically, The module is good to move to ITW tomorrow morning. |