Laura Lambert wrote: |
Monday, June 17, 2013, 16:57
Target is loaded with 510 SiC discs
Container was previously coated with TaC and sintered
SiC is wrapped with tantalum heat shield
Chamber is currently being pumped down
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Tuesday, June 18, 2013, 16:16
HS water valves opened; no leaks were detected.
IG @ 8.9e-7 Torr.
Note: This target has a regular end cap inserted on one end, and the other with a D-cap.
TGHT will be heated up to 820A and TBHT to 300A; ramping rate at 1A/min.
Stepped up TGHT/TBHT to 60A. Vacuum slowly increasing...
Tuesday, June 18, 2013, 17:55
Stepped up TGHT/TBTH to 80A. 10 mins later, pressure went beyond the limit and tripped of the p/s. F!
Allowed vacuum to come down below 8e-5 Torr. Stepped down TGHT/TBHT to 50A.
Currently IG @ 4.8-5 Torr.
Initiated auto-ramping: setting: Good Vac = 3e-5 Torr, Bad Vac = 4.0e-5 Torr.
Thursday, June 20, 2013, 06:21
About 10 min ago, Evap tripped off due to high vacuum.
Vacuum came back down below the trip limit and both TGHT/TBHT p/s were stepped down to 40A and turned back on.
Changed auto ramping rate to 05A/120min.
The process continues... (And I'm going back to sleep!)
Friday, June 21, 2013, 15:19
Vacuum is close to the trip limit.
Change the ramping rate to 0.2A/120min.
Monday, June 24, 2013, 17:04
Organic burnt out is complete and vacuum has come down to ~9.0e-6 Torr.
Increase ramping rate to 0.2A/60min - The sintering process should take about another 2 days if everything goes smoothly.
Wednesday, June 26, 2013, 17:29
TGHT & TBHT have reached to 820A and 300A, respectively, for 4 hours.
Vacuum is at 9e-7 Torr.
Cooling down is in progress, at a rate of 1.0A/min for TGHT and 0.5A/min for TBHT.
The target will be ready to come out by tomorrow.
Thursday, June 27, 2013, 11:02
TGHT/TBHT reached to 0A. Vacuum is leveled at 1.2e-7 Torr.
Chamber will be vented in air soon.
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