Monday, September 28, 2020, 11:49
6 discs of np-SiC were loaded to the target boat wrapped with 3 layers of heat shields.
Desired temperature at 1500 C, (As per e-log 414/416, TGHT = 450A/7.31V, 3.28kW)
Omega slope set at 1.05 (for carbide)
Good vac = 3.0e-5 Torr,
Bad vac = 5.0e-5 Torr.
Pumping down in progress
Monday, September 28, 2020, 21:44
Pressure at 1e-6 Torr. Initiated autoramping at 0.2A/min to reach 300 A. Monitor temp.
Wednesday, September 30, 2020, 11:39
TGHT reached to 300 A/ 4.5V, temp at 1130 C. No coating on windows.
Continue to ramp up 330A. Monitor temp.
Wednesday, September 30, 2020, 16:38
TGHT reached 330 A / 5.04 V, temp at 1190 C.
Ramp up to 400 A. Current pressure at 9.8 e-7 Torr.
Thursday, October 01, 2020, 10:28
TGHT reached 400 A/ 6.3V, temp at 1320 C. Continue to ramp up to 450 A.
Thursday, October 01, 2020, 16:44
TGHT reached to 450 A/ 7.4 V. TEmp at 1500 C.
Pressure at 1.35 e-6 Torr and coming down. Continue to hold TGHT at 1500 C for at least 24 hr.
Sunday, October 04, 2020, 16:49
TGHT has been holding at 450 A/ 7.3 V for nearly 3 days; temp has gone up and stabilized at 1554 C; pressure at 2.13 e -7 Torr.
Initiated cooling down at -2A/min.
Monday, October 05, 2020, 10:02
Chamber vented.
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