Tuesday, August 14, 2012, 15:44
This SiC target was prepared in May 2011 with the Evaporator#1. The target will not used for online.
Two endcaps were inserted with the new expansion tool. The target will be heated up to the normal operating condition (TGHT =580A, TBHT = 230A).
The chamber is currently being pumped down.
Tuesday, August 14, 2012, 16:21
Earlier, the Cu-heat shield was removed from the evaporator to replace the insulators, so all the seals were placed with new ones. However,
there seems to be some leaks after the HS cooling water is turned on. (see attachment#1).
The TP off, and the chamber is vented for investigation.
Tuesday, August 14, 2012, 17:25
All the 3 seals for the Cu-heat shield were replaced. The chamber has been pumped down and the HS water valve is open. No leaks are detected.
Tuesday, August 14, 2012, 17:29
Initiated auto-ramping at 2A/min for both TGHT and TBHT.
Parameter constraints: good vac @ 2.0e-5 Torr, bad vac @ 3.0e-5 Torr.
Currently, IG1 @ 6.5e-6 Torr.
Wednesday, August 15, 2012, 09:52
TGHT and TBHT have reached to 520A and 230A, respectively, and have stayed at the currents for about 10 hours. (see attachment #2)
IG is currently at 7.7e-7 Torr.
Initiating auto-cool down at 2A/min.
Thursday, August 16, 2012, 11:23
Chamber is vented.
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