Tuesday, May 16, 2017, 10:56
Target container contains 460 discs of SiC
Target packed length = 17cm.
Mass of SiC(green) = 55.5152g
Consists of 4 packs of 5 and 440 singles.
Container is wrapped with 1x heatshield around each side of cooling fins; no end caps are inserted yet - coated spring inserted both sides to hold discs in place.
Sintering temp = 1800C
Chamber is currently being pumped down.
Tuesday, May 16, 2017, 15:27
HS water valves turned on, no leaks detected.
Tapped up manually to 30A
Waited ~30min , vacuum stable.
IGP1 = 8.25e-6 Torr
Initiating auto-ramp at 0.2A/min and 0.1A/min for the TGHT and TBHT respectively.
TGHT max = 400A. TBHT max at 230A.
Slope on OMEGA = 1.09 [see elog i.d. # 370 for reasoning behind OMEGA slope choice]
Friday, May 19, 2017, 10:13
TGHT = 250A, 3.11V DR = 248A, 3.3V
TBHT = 137A, 1.68V DR = 140A, 1.73V
OMEGA = 1100C
IGP1= 6.9e-6 Torr DR = 1e-5mbar
IGP2 = 5.9e-6 Torr DR = 6.45e-6 Torr
Vacuum stable.
Increasing ramping rate to 1.0A/min and 0.5A/min for the TGHT and TBHT respectively.
Friday, May 19, 2017, 10:33
Change in plan and switching ramping rate to 0.5A/min and 0.2A/min for the TBHT and TGHT respectively.
Friday, May 19, 2017, 14:49
TGHT = 400A, 5.46
TBHT = 200A, 2.66
IGP1 = 2.7e-5 Torr
IGP2 = 2.2e-5 Torr
OMEGA = 1200C
Increasing max setpoint for TGHT to 550A
Decreasing ramping rate to 0.2A/min and 0.1A/min for over the weekend.
Tuesday, May 23, 2017, 09:23
TGHT = 550A, 8.37
TBHT = 230A, 3.14
IGP1 = 1.6e-7 Torr
IGP2 = 1.6e-7 Torr
OMEGA = 1570C
Increasing max setpoint for TGHT to 600A at rate to 0.5A/min
Tuesday, May 23, 2017, 11:45
TGHT = 600A, 9.36
IGP1 = 3.5e-7 Torr
IGP2 = 3.8e-7 Torr
OMEGA = 1675C
Increasing max setpoint for TGHT to 625A at rate to 0.5A/min
Tuesday, May 23, 2017, 13:03
TGHT = 625A, 9.80V
IGP1 = 5.2e-7 Torr
IGP2 = 5.7e-7 Torr
OMEGA = 1715C
OMEGA no longer valid around 640A as temperature drops instantly after tapping up.
Could be due to target movement at high temperature.
No obvious window coating.
Tapped up manually to 660A, 10.49V.
Will remain at max setpoint overnight.
Wednesday, May 24, 2017, 11:13
TGHT = 660A, 10.74V
TGHT power supply = 662A, 11.00V
TBHT = 230A, 3.16V
TBHT power supply = 232A, 3.25V
IGP1 = 4.2e-7 Torr
IGP1 direct readout = 5.9e-7 mbar
IGP2 = 4.6e-8 Torr
IGP2 direct readout = 5e-7 Torr
Evap2 reached max setpoint yesterday afternoon.
Window has thiny coating - see attached photo.
OMEGA = 1800
MIKRON = ~1800
Initiating auto cool at 2.0A/min and 1.0A/min for the TGHT and TBHT respectively.
Wednesday, May 24, 2017, 11:36
Change of plan.
TGHT = 620A, TBHT = 210A
Ramping back-up to max setpoints and will remain at those points until vacuum starts to decrease more.
Friday, May 26, 2017, 15:24
IGP1 = 2.1e-7 Torr
IGP2 = 2.2e-7 Torr
TGHT = 660A, 10.72V
TBHT = 230A, 3.21V
All windows coated.
Remained at max setpoints for ~3.5days.
Conditioning process complete.
Initiating auto-cool at 2A/min and 1A/min for the TGHT and TBHT respectively.
Tuesday, May 30, 2017, 14:41
Target vented in air and removed from evap2
Looks good!
Endcaps inserted and expanded.
See photos attached.
|