Service of MCIS. Plasma chamber cleaned. Repaired shorted, Right steering plate. Added shields to help prevent coating of wires. Beam is off centre on first collimator of steering assembly.
Moved Ground electrode away from PE approximately 0.10".
Note: the plasma chamber and ground electrode tip are clean.
2015-05-19 Repaired shorted MWS PE. Internal short was found. The source chamber was vented and cleaned. The beaker was replaced with a new one (it was coated with carbon). WPI2015-05-19-2
Investigate Shorted MWS PE and MCIS shorted steering plate WOI2015-05-19-1 |