MCIS-
the cleaning has been completed. The oven assembly is removed and the gate valve closed.
The quartz tubes on the ground electrode have been installed with the larger diameter tube pushed as far downstream (toward the optics box) as possible. The smaller tube has been positioned to extend 1-3/4" into the plasma chamber w.r.t. the insulator flange.
Currently the turbos are running and the source is pumping down.
Note-
there was a Controls problem when trying to operate the source. They tracked the problem down to a bad ethernet communication cable. A temporary cable is in place while a new one is being prepared. |