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Message ID: 207     Entry time: Tue Dec 8 12:40:17 2009
Author: Damien Gallop 
Type:  
Category:  
Subject: OLIS development for CUSP source continued 

Fuse for FUG power supply obtained and installed. Source is up and warming up. ~100enA on FC6.

Later ~14:00: Tweak things up. We now have a more stable 380enA on FC6. IOS:IG1 = 7e-7 Torr.

Later ~15:15: Adjust source gas metering valve "just a little"... and effectively vent the tank. This needs work. Recover, restart source. Wait and watch how beam responds to gas pressure. See attached stripchart.

Later ~16:00: Increase arc power & filament current. Arc current jumps from <100mA to >3A. Also increased current load on bias & EE.

Arc = 135V @ 3.0A

Fil = 3.25V @ 138A

Bias = 28kV @ 788uA.

EE = 2.07kV @ 4.9mA

PE = 97V @ 149mA

Gas = 0.41ccm

First mass scan attached with arc current at 3A.

Second mass scan in progress

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