Fuse for FUG power supply obtained and installed. Source is up and warming up. ~100enA on FC6.
Later ~14:00: Tweak things up. We now have a more stable 380enA on FC6. IOS:IG1 = 7e-7 Torr.
Later ~15:15: Adjust source gas metering valve "just a little"... and effectively vent the tank. This needs work. Recover, restart source. Wait and watch how beam responds to gas pressure. See attached stripchart.
Later ~16:00: Increase arc power & filament current. Arc current jumps from <100mA to >3A. Also increased current load on bias & EE.
Arc = 135V @ 3.0A
Fil = 3.25V @ 138A
Bias = 28kV @ 788uA.
EE = 2.07kV @ 4.9mA
PE = 97V @ 149mA
Gas = 0.41ccm
First mass scan attached with arc current at 3A.
Second mass scan in progress |